XY Flexure Scanners
Invenios series of dual axis, piezo driven flexures achieve extended range of motion with sub-nanometer precision. This technology is available on scanners from 50 microns to 800 microns with true 18 bit dynamic range. All stages have closed-loop feedback with extremely low out-of-plane motion, making them the perfect choice for AFM.
Scanner Upgrade Kits for Atomic Force Microscopes, Flat & Fast
Invenios offers XY flexure upgrade kits for Veeco/DI and many other AFM systems. You can now upgrade your tube scanning AFM and decouple the XY motion from the Z motion. The result is lower out-of-plane motion, providing flat scans without performing curvature removal on your image.
Scanner upgrade kits are available from 50 microns up to 800 microns for demanding metrology applications. The XY flexure scanner is mounted below your existing AFM tube scanner. Additional hardware and software is included to interface the XY scanner to your AFM controller. This allows you to turn the XY direction of the tube scanner on and off. Once installed, the system gives you the freedom to choose between using the decoupled XY or the tube scanner XY. With the upgrade, you get the best of both worlds.
Another added benefit of our scanner upgrades is increased scan speed. Traditionally, AFMs scan at very slow rates; somewhere between 0.5 Hz to 1.5 Hz is the normal range of conventional systems. Depending on the exact AFM system, you will be able to scan 5 times faster or higher, rates from 5 Hz to 50 Hz and beyond. Our scanner upgrades are able to scan at very high frequencies. Once installed, the limiting factor for speed is the AFM's Z tracking and electronics capability. This means less time to acquire the same data. User facilities will be able to service more people without extending their hours of operation.
AFM scanner upgrades are available now that interface with Veeco control electronics. Our scanner electronics interface with the NanoScope 3, 3A, 4, 4A and V controllers. AFM scanner upgrades are also available for non-Veeco AFM systems. Please contact Nanounity for scanner specifications and scanner details for your exact AFM system.
The Invenios series of profiler stages meets the tighter tolerances (<10nm over 10mm straightness) for demanding applications such as site flatness on polished substrates, CMP monitoring, diamond turned or charged surfaces, surface form and finish measurements.
You can select profiler stages with scan lengths ranging from 10 mm to 150 mm. Optional X Y profile scanning is available up to 25mm x 25mm square areas. These stages are perfect for demanding long range atomic force profiling. Invenios can provide profiler stages as an upgrade to existing platforms or custom design and deliver profiler systems.
The InvenioSix assembly platform delivers long range translation (±15mm) and rotation (± 15º) designed to meet the most demanding 6 degree-of-freedom alignment and assembly applications. Unlike most anthropomorphic nanopositioners that use sliding bearing elements to couple motions to the platform output, the InvenioSix employs a tripod structure that couples the motions from X-Y nanopositioners at the base of each leg to the platform output with proprietary rotary flexures that provide direct coupling without backlash and other sources of “lost” motion. The result is high static and dynamic stiffness on the nano-scale that makes the InvenioSix the ideal choice in high force applications including tri-color optical alignment in light engines and high performance color imaging systems. The InvenioSix has mounting surfaces on two planes and can be mounted up-right, upside-down and on its side.