TGT1

The NT-MDT TGT1 test grating is intended for 3D visualization of the tip, determination of the tip sharpness (aspect ratio and radius of curvature), tip degradation and contamination. The pattern is an array of sharp points, with a tip angle of about 50 degrees, 10nm radius of curvature, period of 0.05 micrometers, diagonal period of 2.12 micrometers and a height of 0.3 - 0.5 micrometers.