TGX1

The NT-MDT TGX1 test grating is intended for lateral calibration of SPM scanners, detection of lateral non-linearity, hysteresis, creep, cross-coupling effects and determine the aspect ratio of the tip. The grating is made of silicon, with a chessboard-like array of square pillars with sharp undercut edges, period is 3.0 microns, edge curvature radius is <10nm and the height is 0.6 microns.